IP Library › Granted Patent US 6,628,500
Granted Patent Utility PCT National Stage
US 6,628,500 · Confirmation No. 2238

METHOD AND APPARATUS FOR DECHUCKING A SUBSTRATE FROM AN ELECTROSTATIC CHUCK

Patented Case View Patent ↗
⬇ PDF
 Code Description Pages PDF
2016-07-05 OATH Oath or Declaration filed 21 View
2003-08-07 IFEE Issue Fee Payment (PTO-85B) 1 View
2003-08-07 LET. Miscellaneous Incoming Letter 1 View
2001-03-29 LET. Miscellaneous Incoming Letter 20 View
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
Patent No.
US 6,628,500
App. No.
09/719,500
Filed
2001-03-29
Granted
2003-09-30
Art Unit
2182
PTA
0 days