Patent Assignment
Reel/Frame 018015/0078
Corrective Assignment to Correct the Docket Number Previously Recorded on Reel 017848 Frame 0567. Assignor(S) Hereby Confirms the Memorandum of License for Registration.
Recorded: 2006-07-26
Received: 2006-07-26
Pages: 10
Assignor
SURFACE TECHNOLOGY SYSTEMS PLC
Executed: 2005-12-23
Assignee
SUMITOMO PRECISION PRODUCTS CO. LTD.
1-10 FUSHO-CHO, AMAGASAKI CITY, HYOGO, JPX, 660-0891, JAPAN
Covered Properties
(3)
Plasma Processing Apparatus
Application:
09/895,169 →
Plasma Processing Apparatus
Application:
09/884,460 →
Method and Apparatus for Dechucking a Substrate from an Electrostatic Chuck
Application:
09/719,500 →