Patent Assignment
Reel/Frame 017846/0567
Memorandum of License for Registration
Recorded: 2006-06-28
Received: 2006-06-28
Pages: 8
Assignor
SURFACE TECHNOLOGY SYSTEMS PLC
Executed: 2005-12-23
Assignee
SUMITOMO PRECISION PRODUCTS CO. LTD.
1-10 FUSHO-CHO, AMAGASAKI CITY, HYOGO, JPX, 660-0891, JAPAN
Covered Properties
(4)
Article Carrier Having Single Sided Releasable Cross Bar
Application:
09/971,838 →
Plasma Processing Apparatus
Application:
09/895,169 →
Plasma Processing Apparatus
Application:
09/884,460 →
Method and Apparatus for Dechucking a Substrate from an Electrostatic Chuck
Application:
09/719,500 →