Patent Assignment
Reel/Frame 012858/0409
Assignment of Assignor's Interest
Recorded: 2002-04-29
Received: 2002-05-08
Pages: 2
Assignors
KOMEMURA, TOSHIO
Executed: 2001-12-27
NOGUCHI, TOSHIHIKO
Executed: 2001-12-27
YAMASHITA, TOSHIHIRO
Executed: 2001-12-27
Assignee
MITSUBISHI DENKI KABUSHIKI KAISHA
2-3, MARUNOUCHI 2-CHOME, CHIYODA-KU, TOKYO, JPX, 100-8, JAPAN
Covered Property
(1)
Conveyor, Method for Conveying a Semiconductor Wafer, and Method for Manufacturing a Semiconductor Device
Application:
10/133,740 →