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App. No. 10/133,740 · Confirmation No. 3617

CONVEYOR, METHOD FOR CONVEYING A SEMICONDUCTOR WAFER, AND METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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 Code Description Pages PDF
2003-09-29 IFEE Issue Fee Payment (PTO-85B) 1 View
2002-04-29 TRNA Transmittal of New Application 2 View
2002-04-29 SPEC Specification 12 View
2002-04-29 CLM Claims 3 View
2002-04-29 ABST Abstract 1 View
2002-04-29 DRW Drawings-only black and white line drawings 10 View
2002-04-29 OATH Oath or Declaration filed 4 View
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Quick Facts
App. No.
10/133,740
Filed
2002-04-29
Granted
2003-11-18
Pub. No.
US20030042115A1
Art Unit
3651
PTA
0 days