Patent Assignment
Reel/Frame 012861/0396
Assignment of Assignor's Interest
Recorded: 2002-05-01
Pages: 3
Assignors
SHANMUGASUNDRAM, ARULKUMAR P.
Executed: 2002-04-24
SCHWARM, ALEXANDER T.
Executed: 2002-04-29
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Dynamic Metrology Schemes and Sampling Schemes for Advanced Process Control in Semiconductor Processing