Patent Assignment
Reel/Frame 012867/0494
Assignment of Assignor's Interest
Recorded: 2002-05-03
Received: 2002-05-10
Pages: 6
Assignors
BAILEY, GEORGE E.
Executed: 2002-05-01
BERMAN, MICHAEL J.
Executed: 2002-05-01
BARBER, RENNIE G.
Executed: 2002-05-02
Assignee
LSI LOGIC CORPORATION
1551 MCCARTHY BLVD., MILPITAS, CA, 95035, UNITED STATES
Covered Property
(1)
Method and Apparatus for Detecting Backside Contamination During Fabrication of a Semiconductor Wafer
Application:
10/138,742 →