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App. No. 10/138,742 · Confirmation No. 2933

METHOD AND APPARATUS FOR DETECTING BACKSIDE CONTAMINATION DURING FABRICATION OF A SEMICONDUCTOR WAFER

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗
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2022-04-15 OATH Oath or Declaration filed 252 View
2003-07-31 IFEE Issue Fee Payment (PTO-85B) 1 View
2003-07-31 LET. Miscellaneous Incoming Letter 2 View
2003-07-31 DRW Drawings-only black and white line drawings 2 View
2002-05-03 TRNA Transmittal of New Application 3 View
2002-05-03 SPEC Specification 9 View
2002-05-03 CLM Claims 5 View
2002-05-03 ABST Abstract 1 View
2002-05-03 DRW Drawings-only black and white line drawings 3 View
2002-05-03 OATH Oath or Declaration filed 3 View
2002-05-03 LET. Miscellaneous Incoming Letter 1 View
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Quick Facts
App. No.
10/138,742
Filed
2002-05-03
Granted
2003-09-30
Art Unit
2812
PTA
-62 days