Patent Assignment
Reel/Frame 012873/0543
Assignment of Assignor's Interest
Recorded: 2002-05-01
Pages: 3
Assignors
REISS, TERRY P.
Executed: 2002-04-24
SHANMUGASUNDRAM, ARULKUMAR P.
Executed: 2002-04-24
SCHWARM ALEXANDER T.
Executed: 2002-04-29
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Integration of Fault Detection with Run-to-Run Control