Patent Assignment
Reel/Frame 012898/0959
Assignment of Assignor's Interest
Recorded: 2002-05-13
Pages: 13
Assignors
CHEN, LING
Executed: 2002-02-22
KU, VINCENT
Executed: 2002-02-21
WU, DIEN-YEH
Executed: 2002-02-21
CHUNG, HUA
Executed: 2002-02-25
OUYE, ALAN
Executed: 2002-02-21
NAKASHIMA, NORMAN
Executed: 2002-02-21
Assignee
APPLIED MATERIALS, INC.
P.O. BOX 450-A, SANTA CLARA, CALIFORNIA, 95052
Covered Property
(1)
Gas Delivery Apparatus and Method for Atomic Layer Deposition