Assignment of Assignor's Interest

Recorded: 2002-05-06 Received: 2002-05-22 Pages: 5

Assignors

RENTELN, PETER

Executed: 2002-03-08

ZHAO, EUGENE

Executed: 2002-03-11

FARBER, JEFFREY

Executed: 2002-03-14

JENSEN, ALAN J.

Executed: 2002-03-18

STELLA, MARIO

Executed: 2002-04-21

Assignee

LAM RESEARCH CORPORATION

4650 CUSHING PARKWAY, FREMONT, CA, 94538, UNITED STATES

Covered Property (1)

Method and Apparatus for Controlling Cmp Pad Surface Finish

Application: 10/039,749 →