IP Library Patent Application 10039749
Patent Application Utility
App. No. 10/039,749 · Confirmation No. 9135

METHOD AND APPARATUS FOR CONTROLLING CMP PAD SURFACE FINISH

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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Code Description Pages PDF
2008-01-15 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2008-01-15 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2003-09-08 IFEE Issue Fee Payment (PTO-85B) 1 View
2001-10-26 TRNA Transmittal of New Application 2 View
2001-10-26 SPEC Specification 15 View
2001-10-26 CLM Claims 6 View
2001-10-26 ABST Abstract 1 View
2001-10-26 DRW Drawings-only black and white line drawings 5 View
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Quick Facts
App. No.
10/039,749
Filed
2001-10-26
Granted
2003-11-11
Pub. No.
US20030082997A1
Art Unit
3723
PTA
-36 days