Patent Assignment
Reel/Frame 012907/0925
Assignment of Assignor's Interest
Recorded: 2002-05-13
Received: 2002-05-22
Pages: 2
Assignor
PANDA, SIDDHARTHA
Executed: 2002-05-10
Assignee
INTERNATIONAL BUSINESS MACHINES CORPORATION
NEW ORCHARD ROAD, ARMONK, NY, 10504, UNITED STATES
Covered Property
(1)
Method to Increase the Etch Rate and Depth in High Aspect Ratio Structure
Application:
10/145,230 →