Patent Assignment
Reel/Frame 012912/0168
Assignment of Assignor's Interest
Recorded: 2002-05-20
Pages: 2
Assignor
KOBAYASHI, KAZUO
Executed: 2002-05-07
Assignee
TOKYO SEIMITSU CO., LTD.
7-1, SHIMORENJAKU 9-CHOME, MITAKA-SHI, TOKYO, JAPAN
Covered Property
(1)
Wafer Planarization Apparatus