Wafer planarization apparatus
The wafer planarization apparatus comprises a processing part which holds a wafer through a protective sheet adhering to the obverse of the wafer and processes the reverse of the wafer, an inspecting device which inspects the wafer having been processed by the processing part, a frame adhering part which adheres a frame through a sheet to the reverse of the wafer having been inspected by the inspecting device, a peeling part which peels the protective sheet from the wafer to which the frame has been adhered, and a transporting device which transports the wafer between the processing part, the inspecting device, the frame adhering part, and the peeling part, so that the series of processing for the wafer can be systematized in line.
1. A wafer planarization apparatus, comprising:
a processing part which holds a wafer through a protective sheet adhering to a first surface of the wafer and processes a second surface of the wafer;
an inspecting device which inspects the wafer having been processed by the processing part;
a frame adhering part which adheres a frame through a sheet to the second surface of the wafer having been inspected by the inspecting device;
a peeling part which peels the protective sheet from the wafer to which the frame has been adhered; and
a transporting device which transports the wafer between the processing part, the inspecting device, the frame adhering part, and the peeling part;
wherein the inspecting device is located within the planarization apparatus between the processing part and the frame adhering part,
wherein the inspecting device comprises a thickness measuring device which measures a thickness of the wafer, and the inspecting device rejects the wafer of which thickness is thicker than a predetermined thickness.
2. A wafer planarization apparatus, comprising:
a processing part which holds a wafer through a protective sheet adhering to a first surface of the wafer and processes a second surface of the wafer;
an inspecting device which inspects the wafer having been processed by the processing part;
a frame adhering part which adheres a frame through a sheet to the second surface of the wafer having been inspected by the inspecting device;
a peeling part which peels the protective sheet from the wafer to which the frame has been adhered; and
a transporting device which transports the wafer between the processing part, the inspecting device, the frame adhering part, and the peeling part;
wherein the inspecting device is located within the planarization apparatus between the processing part and the frame adhering part,
wherein the inspecting device comprises a visual inspecting device which visually inspects the wafer for breaks.
3. A wafer planarization apparatus, comprising:
a processing part which holds a wafer through a protective sheet adhering to a first surface of the wafer and processes a second surface of the wafer;
an inspecting device which inspects the wafer having been processed by the processing part;
a frame adhering part which adheres a frame through a sheet to the second surface of the wafer having been inspected by the inspecting device;
a peeling part which peels the protective sheet from the wafer to which the frame has been adhered; and
a transporting device which transports the wafer between the processing part, the inspecting device, the frame adhering part, and the peeling part;
wherein the inspecting device is located within the planarization apparatus between the processing part and the frame adhering part,
wherein:
the transporting device transports the wafer having been processed by the processing part to the inspecting device; and
the transporting device transports the wafer having been accepted by the inspecting device to the frame adhering part, and transports the wafer having been rejected by the inspecting device to the processing part so as to reprocess the wafer.
4. The wafer planarization apparatus according to claim 3 , wherein the inspecting device comprises a thickness measuring device which measures a thickness of the wafer, and the inspecting device rejects the wafer of which thickness is thicker than a predetermined thickness.
5. The wafer planarization apparatus according to claim 3 , wherein the inspecting device comprises a visual inspecting device which visually inspects the wafer for breaks.