Patent Assignment
Reel/Frame 012914/0827
Assignment of Assignor's Interest
Recorded: 2002-05-17
Received: 2002-05-24
Pages: 2
Assignor
KANNO, ITARU
Executed: 2002-04-17
Assignee
MITSUBISHI DENKI KABUSHIKI KAISHA
CHIYODA-KU, 2-3, MARUNOUCHI 2-CHOME, TOKYO 100-8310, JPX, JAPAN
Covered Property
(1)
Two-Fluid Cleaning Jet Nozzle, Cleaning Equipment and Method of Fabricating Semiconductor Device Employing the Same
Application:
10/147,068 →