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App. No. 10/147,068 · Confirmation No. 1309

TWO-FLUID CLEANING JET NOZZLE, CLEANING EQUIPMENT AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE EMPLOYING THE SAME

Inventor: Itaru Kanno
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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 Code Description Pages PDF
2004-02-11 IFEE Issue Fee Payment (PTO-85B) 1 View
2002-05-17 TRNA Transmittal of New Application 2 View
2002-05-17 SPEC Specification 13 View
2002-05-17 CLM Claims 2 View
2002-05-17 ABST Abstract 1 View
2002-05-17 DRW Drawings-only black and white line drawings 5 View
2002-05-17 OATH Oath or Declaration filed 3 View
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Quick Facts
App. No.
10/147,068
Filed
2002-05-17
Granted
2004-03-23
Pub. No.
US20030089799A1
Art Unit
3743
PTA
-52 days