Patent Assignment
Reel/Frame 012918/0913
Assignment of Assignor's Interest
Recorded: 2002-05-20
Pages: 2
Assignors
MATSUSHITA, MINORU
Executed: 2002-05-15
KODASHIMA, YASUSHI
Executed: 2002-05-15
KUMAI, TOSHIKAZU
Executed: 2002-05-15
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
Processing Apparatus, Transferring Apparatus and Transferring Method