Patent Assignment
Reel/Frame 012926/0154
Assignment of Assignor's Interest
Recorded: 2002-05-21
Received: 2002-05-30
Pages: 2
Assignor
IWASAKI, HARUO
Executed: 2002-05-15
Assignee
NEC CORPORATION
7-1, SHIBA 5-CHOME MINATO-KU, TOKYO, JPX, JAPAN
Covered Property
(1)
Phase-shifting mask and method of fabricating the same
Application:
10/152,268 →