Patent Assignment
Reel/Frame 012953/0951
Assignment of Assignor's Interest
Recorded: 2002-06-07
Pages: 3
Assignors
KUZNETSOV, VLADIMIR
Executed: 2002-05-31
GRISEL, RUUD
Executed: 2002-05-31
GRANNEMAN, ERNST
Executed: 2002-05-31
Assignee
ASM INTERNATIONAL N.V.
REMBRANDTLAAN 7-9, BILTHOVEN 3723 BG, NETHERLANDS
Covered Property
(1)
Temperature Control for Single Substrate Semiconductor Processing Reactor