Patent Assignment
Reel/Frame 012960/0692
Assignment of Assignor's Interest
Recorded: 2002-05-28
Pages: 3
Assignors
TOSHIMA, TAKAYUKI
Executed: 2002-05-22
SHINDO, NAOKI
Executed: 2002-05-22
IINO, TADASHI
Executed: 2002-05-22
Assignee
TOKYO ELECTRON LIMITED
MINATO-KU, 3-6 AKASAKA 5-CHOME, TOKYO-TO, JAPAN
Covered Property
(1)
Substrate Processing Method and Substrate Processing Apparatus