Patent Assignment
Reel/Frame 012969/0508
Assignment of Assignor's Interest
Recorded: 2002-06-05
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
TBS BROADCAST CENTER, 3-6 AKASAKA 5-CHOME, MINATO-KU, TOKYO 107, JAPAN
Covered Property
(1)
Pulsed Plasma Processing Method and Apparatus