Assignment of Assignor's Interest

Recorded: 2002-06-06 Pages: 5

Assignors

WESTERMAN, RUSSELL

Executed: 2002-05-06

JOHNSON, DAVID J.

Executed: 2002-05-06

Assignee

UNAXIS USA INC.

10050 16TH ST. N., ST. PETERSBURG, FLORIDA, 33716

Covered Property (1)

Etching of thin, damage sensitive layers using high frequency pulsed plasma

Application: 60/342,251 →