IP Library › Patent Application 60342251
Patent Application Provisional
App. No. 60/342,251 · Confirmation No. 9923

Etching of thin, damage sensitive layers using high frequency pulsed plasma

Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2001-10-22 TRNA Transmittal of New Application 2 View
2001-10-22 SPEC Specification 4 View
2001-10-22 CLM Claims 1 View
2001-10-22 DRW Drawings-only black and white line drawings 30 View
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Quick Facts
App. No.
60/342,251
Filed
2001-10-22