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App. No. 10/277,261 · Confirmation No. 6628

Etching of thin damage sensitive layers using high frequency pulsed plasma

Abandoned -- After Examiner's Answer or Board of Appeals Decision View Publication ↗
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2009-03-11 ABN Abandonment 2 View
2008-12-30 APDA Patent Board Decision - Examiner Affirmed 6 View
2008-09-19 AP_DK_M Appeal Docketing Notice 2 View
2008-01-08 APEA Examiner's Answer to Appeal Brief 8 View
2007-11-01 AP.B Appeal Brief Filed 17 View
2007-11-01 N417 Electronic Filing System Acknowledgment Receipt 2 View
2007-10-26 CTMS Miscellaneous Action with shortened statutory period (SSP) 2 View
2007-08-20 AP.B Appeal Brief Filed 16 View
2007-08-20 N417 Electronic Filing System Acknowledgment Receipt 2 View
2007-08-20 WFEE Fee Worksheet (SB06) 1 View
2007-06-20 N/AP Notice of Appeal Filed 1 View
2007-06-20 WFEE Fee Worksheet (SB06) 2 View
2007-06-20 N417 Electronic Filing System Acknowledgment Receipt 2 View
2007-04-26 CTAV Advisory Action (PTOL-303) 2 View
2007-04-26 CLM Claims 1 View
2007-04-20 A.NE Response After Final Action 1 View
2007-04-20 CLM Claims 13 View
2007-04-20 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2007-04-20 N417 Electronic Filing System Acknowledgment Receipt 2 View
2007-04-20 WFEE Fee Worksheet (SB06) 1 View
2007-02-21 CTFR Final Rejection 7 View
2007-02-21 892 List of references cited by examiner 1 View
2006-11-30 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2006-11-30 CLM Claims 12 View
2006-11-30 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2006-11-30 C.AD Change of Address 1 View
2006-11-30 XT/ Extension of Time 1 View
2006-11-30 LET. Miscellaneous Incoming Letter 2 View
2006-06-01 CTNF Non-Final Rejection 6 View
2006-03-14 EXIN Examiner Interview Summary Record (PTOL - 413) 3 View
2006-03-14 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2006-03-14 CLM Claims 14 View
2006-03-14 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2006-03-14 WFEE Fee Worksheet (SB06) 1 View
2006-01-03 CTNF Non-Final Rejection 7 View
2005-12-16 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2005-12-16 CLM Claims 14 View
2005-12-16 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2005-12-16 RCEX Request for Continued Examination (RCE) 2 View
2005-12-16 LET. Miscellaneous Incoming Letter 2 View
2005-12-16 WFEE Fee Worksheet (SB06) 1 View
2005-12-16 ANE.I Amendment After Final or under 37CFR 1.312, initialed by the examiner. 1 View
2005-11-28 CTAV Advisory Action (PTOL-303) 3 View
2005-11-28 CLM Claims 1 View
2005-11-17 A.NE Response After Final Action 3 View
2005-11-17 CLM Claims 14 View
2005-11-17 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2005-11-17 WFEE Fee Worksheet (SB06) 1 View
2005-11-03 CTMS Miscellaneous Action with shortened statutory period (SSP) 2 View
2005-11-03 892 List of references cited by examiner 1 View
2005-11-03 FOR Foreign Reference 8 View
2005-09-21 CTFR Final Rejection 7 View
2005-09-21 892 List of references cited by examiner 1 View
2005-09-21 FOR Foreign Reference 5 View
2005-09-21 SRFW Search information including classification, databases and other search related notes 1 View
2005-09-17 SRNT Examiner's search strategy and results 2 View
2005-06-30 A... Amendment/Request for Reconsideration-After Non-Final Rejection 3 View
2005-06-30 CLM Claims 14 View
2005-06-30 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2005-06-30 WFEE Fee Worksheet (SB06) 1 View
2005-04-14 CTNF Non-Final Rejection 7 View
2005-04-14 1449 List of References cited by applicant and considered by examiner 2 View
2005-04-14 892 List of references cited by examiner 1 View
2005-04-14 SRFW Search information including classification, databases and other search related notes 1 View
2005-04-14 BIB Bibliographic Data Sheet 1 View
2004-12-21 ELC. Response to Election / Restriction Filed 3 View
2004-12-21 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2004-12-21 136A Authorization for Extension of Time all replies 1 View
2004-12-21 WFEE Fee Worksheet (SB06) 1 View
2004-11-26 CTRS Requirement for Restriction/Election 4 View
2004-08-18 A... Amendment/Request for Reconsideration-After Non-Final Rejection 4 View
2004-07-22 CTRS Requirement for Restriction/Election 4 View
2004-02-04 C.AD Change of Address 1 View
2004-02-04 LET. Miscellaneous Incoming Letter 3 View
2003-02-21 IDS Information Disclosure Statement (IDS) Form (SB08) 6 View
2002-10-22 TRNA Transmittal of New Application 3 View
2002-10-22 SPEC Specification 22 View
2002-10-22 CLM Claims 14 View
2002-10-22 ABST Abstract 1 View
2002-10-22 DRW Drawings-only black and white line drawings 6 View
2002-10-22 OATH Oath or Declaration filed 4 View
2002-10-22 WFEE Fee Worksheet (SB06) 1 View
2002-10-22 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
10/277,261
Filed
2002-10-22
Pub. No.
US20030077910A1
Art Unit
1792