Patent Assignment
Reel/Frame 013410/0592
Assignment of Assignor's Interest
Recorded: 2002-10-22
Pages: 5
Assignee
UNAXIS USA, INC.
10050 16TH STREET NORTH, ST. PETERSBURG, FLORIDA, 33716
Covered Property
(1)
Etching of thin damage sensitive layers using high frequency pulsed plasma
Application:
10/277,261 →
Publication:
US 2003/0077910
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.