Patent Assignment
Reel/Frame 012978/0887
Assignment of Assignor's Interest
Recorded: 2002-06-07
Received: 2002-06-17
Pages: 6
Assignors
NORTON, ADAM E.
Executed: 2002-05-22
SEZGINER, ABDURRAHMAN
Executed: 2002-05-22
STANKE, FRED E.
Executed: 2002-05-22
Assignee
THERMA-WAVE, INC.
1250 RELIANCE WAY, FREMONT, CA, 94539, UNITED STATES
Covered Property
(1)
Polarimetric Scatterometer for Critical Dimension Measurements of Periodic Structures
Application:
10/112,138 →