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App. No. 10/112,138 · Confirmation No. 3567

POLARIMETRIC SCATTEROMETER FOR CRITICAL DIMENSION MEASUREMENTS OF PERIODIC STRUCTURES

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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2004-03-18 EXIN Examiner Interview Summary Record (PTOL - 413) 2 View
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2004-02-25 FWCLM Index of Claims 1 View
2004-02-25 WFEE Fee Worksheet (SB06) 1 View
2004-02-17 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2004-02-17 CLM Claims 4 View
2004-02-17 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2004-02-17 LET. Miscellaneous Incoming Letter 1 View
2003-11-19 CTNF Non-Final Rejection 16 View
2003-11-19 1449 List of References cited by applicant and considered by examiner 1 View
2003-11-19 892 List of references cited by examiner 1 View
2003-11-19 FWCLM Index of Claims 1 View
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2003-11-12 SRNT Examiner's search strategy and results 3 View
2003-08-14 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2003-08-14 CLM Claims 8 View
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2003-08-14 LET. Miscellaneous Incoming Letter 1 View
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2003-05-13 CTMS Miscellaneous Action with shortened statutory period (SSP) 2 View
2003-04-30 CTNF Non-Final Rejection 17 View
2003-04-30 892 List of references cited by examiner 1 View
2003-04-30 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2003-04-24 SRNT Examiner's search strategy and results 3 View
2003-04-14 PA.. Power of Attorney 2 View
2003-01-21 FOR Foreign Reference 12 View
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2002-06-11 LET. Miscellaneous Incoming Letter 9 View
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2002-05-02 CTMS Miscellaneous Action with shortened statutory period (SSP) 2 View
2002-03-29 TRNA Transmittal of New Application 3 View
2002-03-29 SPEC Specification 18 View
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2002-03-29 SPEC Specification 18 View
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2002-03-29 WCLM Claims Worksheet (PTO-2022) 1 View
2002-03-29 WFEE Fee Worksheet (SB06) 1 View
2002-03-29 WFEE Fee Worksheet (SB06) 1 View
2002-03-29 FWCLM Index of Claims 1 View
2002-03-29 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2002-03-29 SRFW Search information including classification, databases and other search related notes 1 View
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Quick Facts
App. No.
10/112,138
Filed
2002-03-29
Granted
2004-08-17
Pub. No.
US20030020912A1
Art Unit
2877
PTA
-15 days