Patent Application
Provisional
App. No. 60/280,714
· Confirmation No. 6187
Polarimetric scatterometer for critical dimension measurements of periodic structures
Provisional Application Expired
Inventors
Adam E. Norton
Palo Alto, CA
Abdurrahman Sezginer
Los Gatos, CA
Attorneys & Agents of Record
Prosecution
- Docket No.
- SEN-017 PRV
- Confirmation No.
- 6187
Child
Claims priority from a provisional application
→
App. 11/903,238
· US 7,471,392
Filed 2007-09-21
· Patented Case
Child
Claims priority from a provisional application
→
App. 10/857,223
· US 6,909,507
Filed 2004-05-28
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child
PCT
is a Continuation of
→
PCT/US2002/009938
Filed 2002-03-29
· RO PROCESSING COMPLETED-PLACED IN STORAGE
Child
Claims priority from a provisional application
→
App. 11/105,099
· US 7,289,219
Filed 2005-04-13
· Patented Case
Child
Claims priority from a provisional application
→
App. 10/112,138
· US 6,778,273
Filed 2002-03-29
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 60/280,714
- Filed
- 2001-03-30
External Links