IP Library › Assignment 012982/0280
Patent Assignment
Reel/Frame 012982/0280

Assignment of Assignor's Interest

Recorded: 2002-06-10 Received: 2002-06-18 Pages: 3
Assignors
MATSUO, TAKAHIRO
Executed: 2002-05-23
SASAGO, MASARU
Executed: 2002-05-23
Assignee
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
1006, OAZA KADOMA, KADOMA-SHI, OSAKA 571-8501, JPX, JAPAN
Covered Property (1)
Soft X-Ray Reduction Projection Exposure System, Soft X-Ray Reduction Projection Exposure Method and Pattern Formation Method
Application: 10/164,615 →