IP Library › Granted Patent US 6,721,390
Granted Patent Utility
US 6,721,390 · Confirmation No. 3204

SOFT X-RAY REDUCTION PROJECTION EXPOSURE SYSTEM, SOFT X-RAY REDUCTION PROJECTION EXPOSURE METHOD AND PATTERN FORMATION METHOD

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Quick Facts
Patent No.
US 6,721,390
App. No.
10/164,615
Filed
2002-06-10
Granted
2004-04-13
Pub. No.
US20030016780A1
Art Unit
2882
PTA
-178 days