Patent Assignment
Reel/Frame 012999/0017
Assignment of Assignor's Interest
Recorded: 2002-06-12
Received: 2002-06-21
Pages: 3
Assignors
BASELMANS, JOHANNES JACOBUS MATHEUS
Executed: 2002-05-27
DE BOEIJ, WILHELMUS PETRUS
Executed: 2002-05-27
MOERS, MARCO HUGO PETRUS
Executed: 2002-05-27
VAN DE KERKHOF, MARCUS ADRIANUS
Executed: 2002-05-27
VAN DER LAAN, HANS
Executed: 2002-05-27
WILLEKERS, ROBERT WILHELM
Executed: 2002-05-27
Assignee
ASML NETHERLANDS B.V.
DE RUN 1110, NL-5503 LA VELDHOVEN, NLX, NETHERLANDS
Covered Property
(1)
Lithographic Projection Apparatus, a Grating Module, a Sensor Module, a Method of Measuring Wave Front Aberrations
Application:
10/073,119 →