IP Library › Granted Patent US 6,650,399
Granted Patent Utility
US 6,650,399 · Confirmation No. 2327

LITHOGRAPHIC PROJECTION APPARATUS, A GRATING MODULE, A SENSOR MODULE, A METHOD OF MEASURING WAVE FRONT ABERRATIONS

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2006-03-24 OATH Oath or Declaration filed 13 View
2006-03-24 LET. Miscellaneous Incoming Letter 1 View
2003-09-16 IFEE Issue Fee Payment (PTO-85B) 1 View
2003-06-18 NOA Notice of Allowance and Fees Due (PTOL-85) 6 View
2003-06-09 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2003-06-09 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2003-03-19 CTNF Non-Final Rejection 7 View
2003-03-19 1449 List of References cited by applicant and considered by examiner 1 View
2003-03-19 892 List of references cited by examiner 1 View
2002-06-12 OATH Oath or Declaration filed 2 View
2002-06-12 DRW Drawings-only black and white line drawings 7 View
2002-06-12 PEFR Applicant Response to Pre-Exam Formalities Notice 5 View
2002-05-10 C.AD Change of Address 1 View
2002-04-12 PEFN Pre-Exam Formalities Notice 2 View
2002-02-12 TRNA Transmittal of New Application 3 View
2002-02-12 SPEC Specification 24 View
2002-02-12 CLM Claims 4 View
2002-02-12 ABST Abstract 1 View
2002-02-12 DRW Drawings-only black and white line drawings 10 View
2002-02-12 TRNA Transmittal of New Application 3 View
2002-02-12 DRW Drawings-only black and white line drawings 7 View
2002-02-12 OATH Oath or Declaration filed 2 View
2002-02-12 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2002-02-12 SRFW Search information including classification, databases and other search related notes 1 View
2002-02-12 FWCLM Index of Claims 1 View
2002-02-12 TRNA Transmittal of New Application 3 View
2002-02-12 DRW Drawings-only black and white line drawings 10 View
2002-02-12 SPEC Specification 24 View
2002-02-12 CLM Claims 4 View
2002-02-12 ABST Abstract 1 View
2002-02-12 WFEE Fee Worksheet (SB06) 1 View
2002-02-12 WCLM Claims Worksheet (PTO-2022) 1 View
2002-02-12 FRPR Certified Copy of Foreign Priority Application 33 View
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Quick Facts
Patent No.
US 6,650,399
App. No.
10/073,119
Filed
2002-02-12
Granted
2003-11-18
Pub. No.
US20020145717A1
Examiner
NGUYEN, HUNG
Art Unit
2851
PTA
0 days