Assignment of Assignor's Interest

Recorded: 2003-10-31 Pages: 3

Assignor

ASML NETHERLANDS B.V.

Executed: 2003-06-27

Assignee

CARL ZEISS SMT AG

CARL-ZEISS-STRASSE 22, 73447 OBERKOCHEN, GERMANY

Covered Property (1)

Lithographic Projection Apparatus, a Grating Module, a Sensor Module, a Method of Measuring Wave Front Aberrations

Patent: 6,650,399 →

Application: 10/073,119 →

Publication: US 2002/0145717

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.