Patent Assignment
Reel/Frame 013001/0089
Assignment of Assignor's Interest
Recorded: 2002-06-13
Received: 2002-06-21
Pages: 2
Assignee
NEC CORPORATION
MINATO-KU, 7-1, SHIBA 5-CHOME, TOKYO, JPX, JAPAN
Covered Property
(1)
Cleaning Water for Cleaning a Wafer and Method of Cleaning a Wafer
Application:
10/167,442 →