Patent Application
Utility
App. No. 10/167,442
· Confirmation No. 6354
CLEANING WATER FOR CLEANING A WAFER AND METHOD OF CLEANING A WAFER
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2004-08-24 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2004-05-27 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 3 | View | |
| 2004-05-27 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 3 | View | |
| 2004-05-27 | 892 |
List of references cited by examiner | 1 | View | |
| 2004-05-27 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2004-05-27 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2004-05-27 | FWCLM |
Index of Claims | 1 | View | |
| 2004-05-25 | SRNT |
Examiner's search strategy and results | 2 | View | |
| 2004-03-23 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2004-03-23 | CLM |
Claims | 4 | View | |
| 2004-03-23 | REM |
Applicant Arguments/Remarks Made in an Amendment | 1 | View | |
| 2004-03-08 | CTRS |
Requirement for Restriction/Election | 5 | View | |
| 2002-06-13 | TRNA |
Transmittal of New Application | 2 | View | |
| 2002-06-13 | ADS |
Application Data Sheet | 3 | View | |
| 2002-06-13 | SPEC |
Specification | 21 | View | |
| 2002-06-13 | CLM |
Claims | 4 | View | |
| 2002-06-13 | ABST |
Abstract | 1 | View | |
| 2002-06-13 | DRW |
Drawings-only black and white line drawings | 8 | View | |
| 2002-06-13 | OATH |
Oath or Declaration filed | 2 | View | |
| 2002-06-13 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2002-06-13 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2002-06-13 | FRPR |
Certified Copy of Foreign Priority Application | 29 | View |
Inventors
Hidemitsu Aoki
Tokyo, JAPAN
Hiroaki Tomimori
Tokyo, JAPAN
Attorneys & Agents of Record
Classification
USPC
438/782
H10P52/00
H10P70/277
H10P50/287
H10P70/23
H10P70/273
H10P70/15
H10P70/56
B08B3/04
C02F2103/346
G03F7/422
Prosecution
- Examiner
- GHYKA, ALEXANDER G
- Art Unit
- 2812
- Customer No.
- 466
- Docket No.
- 8008-1012
- Confirmation No.
- 6354
Foreign Priority
2001-179081
·
2001-06-13
·
JAPAN
Publication
- Pub. No.
- US20020189639A1
- Pub. Date
- 2002-12-19
Patent Term Adjustment
0days
No related applications found.
from
NEC CORPORATION
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2003-05-02
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-06-13
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Quick Facts
- App. No.
- 10/167,442
- Filed
- 2002-06-13
- Granted
- 2004-09-28
- Pub. No.
- US20020189639A1
- Examiner
- GHYKA, ALEXANDER G
- Art Unit
- 2812
- PTA
- 0 days
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