Patent Assignment
Reel/Frame 013001/0879
Assignment of Assignor's Interest
Recorded: 2002-06-12
Pages: 2
Assignee
DAINIPPON SCREEN MFG. CO., LTD.
HORIKAWA-DORI KAMIKYO-KU, 1-1 TENJINKITA-MACHI TERANOUCHI-AGARU 4-CHOME, KYOTO, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Method Including a Device for Applying a Coating and a Device for Measuring the Film Quality of the Coating
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.