Patent Assignment
Reel/Frame 013005/0964
Assignment of Assignor's Interest
Recorded: 2002-06-24
Pages: 3
Assignors
TOIS, EVA
Executed: 2002-06-04
HAUKKA, SUVI
Executed: 2002-05-22
TUOMINEN, MARKO
Executed: 2002-05-21
Assignee
ASM MICROCHEMISTRY OY
KUTOJANTIE 2 B, ESPOO, FIN-0, FINLAND
Covered Property
(1)
Atomic-Layer-Chemical-Vapor-Deposition of Films That Contain Silicon Dioxide
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.