Patent Assignment
Reel/Frame 013031/0525
Assignment of Assignor's Interest
Recorded: 2002-08-28
Pages: 2
Assignor
TAKANO, SATOSHI
Executed: 2002-07-31
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-20, 3-CHOME, HIGASHI-NAKANO, NAKANO-KU, TOKYO 164-8511, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Method for Manufacturing Semiconductor Device
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.