Patent Assignment
Reel/Frame 013038/0492
Assignment of Assignor's Interest
Recorded: 2002-06-18
Pages: 7
Assignors
SCHWARM, ALEXANDER T.
Executed: 2002-06-14
SHANMUGASUNDRAM, ARULKUMAR P.
Executed: 2002-06-15
PAN, RONG
Executed: 2002-06-14
HERNANDEZ, MANUEL
Executed: 2002-06-14
MOHAMMAD, AMNA
Executed: 2002-06-14
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Method of Feedback Control of Sub-Atmospheric Chemical Vapor Deposition Processes