Patent Assignment
Reel/Frame 013042/0815
Assignment of Assignor's Interest
Recorded: 2002-06-17
Pages: 3
Assignor
SHAN, HONGQING
Executed: 2002-06-17
Assignee
APPLIED MATERIALS, INC.
LEGAL AFFAIRS DEPARTMENT, P.O. BOX 450A, SANTA CLARA, CALIFORNIA, 95052
Covered Property
(1)
Gas Flow Division in a Wafer Processing System Having Multiple Chambers