Patent Assignment
Reel/Frame 013044/0879
Assignment of Assignor's Interest
Recorded: 2002-06-24
Pages: 2
Assignors
KLEIN, KLAUS-DIETER
Executed: 2002-03-26
PETASCH, THOMAS
Executed: 2002-03-27
MUENKER, HARTMUT
Executed: 2002-05-16
Assignee
CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG
CARL-ZEISS-STRASSE 22, D-73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Adjusting Apparatus for Devices and for Setting Adjustments
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.