Patent Assignment
Reel/Frame 013052/0827
Assignment of Assignor's Interest
Recorded: 2002-07-01
Received: 2002-07-09
Pages: 2
Assignor
PHILIPS SEMICONDUCTORS, INC.
Executed: 2002-06-20
Assignee
KONINKLIJKE PHILIPS ELECTRONICS N.V.
GROENEWOUDSEWEG 1, EINDHOVEN, NLX, 5621, NETHERLANDS
Covered Property
(1)
Method of Illumination Uniformity in Photolithographic Systems
Application:
09/874,607 →