Patent Application
Utility
App. No. 09/874,607
· Confirmation No. 6708
METHOD OF ILLUMINATION UNIFORMITY IN PHOTOLITHOGRAPHIC SYSTEMS
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-06-05 | TRNA |
Transmittal of New Application | 3 | View | |
| 2001-06-05 | SPEC |
Specification | 16 | View | |
| 2001-06-05 | CLM |
Claims | 5 | View | |
| 2001-06-05 | ABST |
Abstract | 1 | View | |
| 2001-06-05 | DRW |
Drawings-only black and white line drawings | 4 | View | |
| 2001-06-05 | OATH |
Oath or Declaration filed | 4 | View |
Inventors
Attorneys & Agents of Record
Classification
USPC
355/77
G03F7/70191
Prosecution
- Examiner
- KIM, PETER B
- Art Unit
- 2851
- Customer No.
- 24737
- Docket No.
- VLSI.082DIV1
- Confirmation No.
- 6708
Publication
- Pub. No.
- US20010026360A1
- Pub. Date
- 2001-10-04
Patent Term Adjustment
-24days
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2011-11-03
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2011-10-31
CHANGE OF NAME
Recorded 2006-12-22
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-07-01
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Quick Facts
- App. No.
- 09/874,607
- Filed
- 2001-06-05
- Granted
- 2002-08-13
- Pub. No.
- US20010026360A1
- Examiner
- KIM, PETER B
- Art Unit
- 2851
- PTA
- -24 days
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