Patent Assignment
Reel/Frame 027145/0435
Assignment of Assignor's Interest
Recorded: 2011-10-31
Received: 2011-10-31
Pages: 4
Assignors
BAKER, DANIEL C.
Executed: 1998-08-03
SETHI, SATYENDRA S.
Executed: 1998-08-03
GHANDEHARI, KOUROS
Executed: 1998-08-15
Assignee
VLSI TECHNOLOGY, INC.
1109 MCKAY DRIVE, SAN JOSE, CA, 95131, UNITED STATES
Covered Property
(1)
Method of Illumination Uniformity in Photolithographic Systems
Application:
09/874,607 →