Patent Assignment
Reel/Frame 027171/0259
Assignment of Assignor's Interest
Recorded: 2011-11-03
Received: 2011-11-03
Pages: 24
Assignor
KONINKLIJKE PHILIPS ELECTRONICS N.V.
Executed: 2006-11-17
Assignee
NXP B.V.
HIGH TECH CAMPUS 60, EINDHOVEN, NLX, 5656 AG, NETHERLANDS
Covered Property
(1)
Method of Illumination Uniformity in Photolithographic Systems
Application:
09/874,607 →