Patent Assignment
Reel/Frame 013058/0124
Assignment of Assignor's Interest
Recorded: 2002-06-26
Received: 2002-07-10
Pages: 3
Assignor
MAUTZ, KARL E.
Executed: 2002-06-25
Assignee
MOTOROLA, INC.
LAW DEPARTMENT, 1303 EAST ALGONQUIN ROAD, SCHAUMBURG, IL, 60196, UNITED STATES
Covered Property
(1)
Method and Apparatus for Monitoring a Polishing Condition of a Surface of a Wafer in a Polishing Process
Application:
10/180,740 →