Patent Assignment
Reel/Frame 013065/0284
Assignment of Assignor's Interest
Recorded: 2002-06-28
Pages: 2
Assignors
OWCZARZ, ALEKSANDER
Executed: 2002-06-27
GOTKIS, YEHIEL
Executed: 2002-06-27
HEMKER, DAVID
Executed: 2002-06-27
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Integration of Sensor Based Metrology into Semiconductor Processing Tools
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.