Patent Assignment
Reel/Frame 013079/0550
Assignment of Assignor's Interest
Recorded: 2002-06-28
Pages: 2
Assignors
SRIVATSAN, SRIDHARAN
Executed: 2002-06-27
GOPALAN, RAMESH
Executed: 2002-06-28
RAMANUJAM, K.Y.
Executed: 2002-06-28
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Method for Reducing or Eliminating De-Lamination of Semiconductor Wafer Film Layers During a Chemical Mechanical Planarization Process
Patent:
7,040,952 →
Application:
10/186,912 →
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.