Patent Assignment
Reel/Frame 013086/0837
Assignment of Assignor's Interest
Recorded: 2002-07-05
Received: 2002-07-19
Pages: 2
Assignor
IDE, SHIGEAKI
Executed: 2002-07-02
Assignee
NEC CORPORATION
7-1, SHIBA 5-CHOME, MINATO-KU, TOKYO, JPX, JAPAN
Covered Property
(1)
Method and Apparatus for Chemical-Mechanical Polishing
Application:
10/190,016 →